JEDEC JEP001-1A
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FOUNDRY PROCESS QUALIFICATION GUIDELINES – BACKEND OF LINE (Wafer Fabrication Manufacturing Sites)
This document describes backend-level test and data methods for the qualification of semiconductor technologies. It does not give pass or fail values or recommend specific test equipment, test structures or test algorithms. Wherever possible, it references applicable JEDEC such as JESD47 or other widely accepted standards for requirements documentation.
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