BS PD ISO/TS 20175:2018
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Vacuum technology. Vacuum gauges. Characterization of quadrupole mass spectrometers for partial pressure measurement
BS PD ISO/TS 20175:2018 describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z < 300.
Cross References:
ISO 3567:2011 Ed 1
ISO 14291
ISO/IEC GUIDE 98-3:2008 Ed 1
GUM: 1995
DIN 28410
All current amendments available at time of purchase are included with the purchase of this document.
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