BS PD ISO/TR 14999-2:2019

This document gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.

Cross References:

ISO 10110-5:1996

ISO 10110-5:2015

ISO/TR 14999-1:2005

ISO 14999-4:2015

ISO/IEC 17025

ISO 10110-14

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